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MPW / Shuttle access

Silex Microsystems SOI MEMS MPW

Plan a SOI MEMS multi-project wafer run at Silex Microsystems through TOMPW Service. We coordinate shared-mask access, EDA sign-off, shuttle scheduling and the downstream packaging or test path for global chip teams.

Node: SOI MEMSMPW, NTO and production evaluation

Why SOI MEMS

SOI MEMS is one of the process options TOMPW coordinates as a shared-mask MPW run at the partner foundry. We handle slot selection, EDA checks and logistics so your design reaches the line on schedule.

What a SOI MEMS MPW at Silex Microsystems involves

A SOI MEMS MPW (multi-project wafer) shuttle places several customer designs on one shared mask set, so each team pays only for its portion of the wafer. TOMPW Service handles slot selection, DRC/LVS review and logistics so your GDSII reaches Silex Microsystems's line on schedule.

Pure-play MEMS process development
MEMS prototyping and volume production
Wafer-level MEMS packaging
Design-enablement support

Technologies & platforms at SOI MEMS

MEMS
Sensor fabrication
Microfluidics
Optical MEMS

Notes for SOI MEMS programs

  • Silex is a dedicated MEMS foundry (no standard CMOS MPW shuttle); engagements are process- and design-based.
  • TOMPW can help scope a Silex MEMS program from prototyping to volume.

Best-fit applications

Inertial and pressure sensorsOptical and microfluidic MEMSBioMEMS and medical devicesMEMS foundry engagement

Expert reviewed

This page is reviewed by Henry, CEO, TOMPW Service. Henry is the CEO of TOMPW Service and a chip-design specialist with 20 years in the semiconductor industry.

Discuss a SOI MEMS MPW at Silex Microsystems

TOMPW Service can coordinate a SOI MEMS MPW shuttle with Silex Microsystems as part of a scoped execution path.

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COMMON QUESTIONS

Working with Silex Microsystems SOI MEMS MPW through TOMPW

Can TOMPW arrange a SOI MEMS MPW shuttle at Silex Microsystems?

Yes. TOMPW coordinates SOI MEMS MPW and shuttle access at Silex Microsystems for overseas teams, handling slot selection, EDA checks and logistics so your design reaches the shared mask on schedule.

What does a SOI MEMS MPW run at Silex Microsystems typically include?

A SOI MEMS MPW run bundles your design onto a shared reticle with other projects, covering mask share, wafer fabrication at Silex Microsystems, and standard probe. Packaging, final test and NTO transition are planned separately with TOMPW.

How long does a SOI MEMS MPW cycle take at Silex Microsystems?

Cycle time depends on Silex Microsystems's shuttle cadence for SOI MEMS, usually a few months from mask data to returned wafers. Missing a window means waiting for the next one, so TOMPW recommends booking early.

What comes after a SOI MEMS MPW at Silex Microsystems?

After a successful SOI MEMS MPW, teams typically move to NTO or full-mask production. TOMPW helps plan that transition, including package selection, test development and volume ramp through Silex Microsystems and downstream partners.

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