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Foundry profile

Sai MicroFoundry profile · process nodes · MPW shuttle windows · tape-out access

Sai Micro (Beijing Sai Microelectronics) is a China-based pure-play MEMS foundry operating an 8-inch MEMS line in Beijing and the Silex Microsystems facility in Sweden. TOMPW Service supports Sai Micro MEMS foundry engagements for sensors, BAW filters, optical MEMS and micro-fluidics.

Reviewed October 29, 20265 process nodes listed: 8-inch MEMS, Surface / bulk micromachining, SOI MEMS and moreScope: MPW, NTO and production evaluation
Sai Micro — representative silicon and device imagery from programs we support

Representative imagery from semiconductor programs we have supported or analysed

Process Nodes

8-inch MEMSSurface / bulk micromachiningSOI MEMSWafer-level packagingTSV

Technologies & Platforms

MEMS
Sensor fabrication
BAW filters
Optical MEMS / micro-mirror
Micro-fluidics
Wafer-level packaging

TOMPW Support Capabilities

✓Pure-play MEMS foundry (Beijing 8-inch line)
✓MEMS process development and volume production
✓Wafer-level MEMS packaging
✓Design-enablement and EDA support

Best For

Inertial and pressure sensorsBAW / RF filtersOptical MEMS and LiDARBioMEMS and medical devicesMEMS foundry engagement

Notes

  • Sai Micro is the China-based MEMS manufacturing arm of Sai MicroElectronics; Silex Microsystems (Sweden, already a TOMPW partner) is its subsidiary.
  • MEMS engagements are process- and design-based rather than standard CMOS MPW shuttles; TOMPW can help scope a Sai Micro MEMS program.

Plan the manufacturing route

Compare the process requirements with the package and test path before selecting a manufacturing route. Confirm the PDK, supplier acceptance, commercial terms and delivery scope in the project proposal.

Discuss Sai Micro for Your Program

Share the application, process requirements and target quantities. TOMPW will review feasibility and identify the access, package and test conditions to confirm for Sai Micro.

Email for a Quote

COMMON QUESTIONS

Planning a Sai Micro project

Can TOMPW arrange MPW or shuttle runs at Sai Micro?

TOMPW reviews MPW, NTO and full-mask options for Sai Micro projects. Process acceptance, PDK access, run availability, quantities and delivery dates are confirmed for the specific project before booking.

What support does TOMPW provide beyond the wafer at Sai Micro?

TOMPW can scope packaging, final test, PCB and assembly work alongside the wafer requirements. The package route, responsible suppliers, test coverage and acceptance criteria are agreed in the project proposal.

How do I get a quote for a Sai Micro engagement?

Email market@tompwservice.com with the application, target process, program stage, volume and package or test needs. Start with non-confidential requirements; design files can follow through an agreed secure handoff.

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RELATED SERVICES

Services that pair with a Sai Micro engagement

MPW / SHUTTLE ACCESS

Plan a Sai Micro MPW by process node

TOMPW coordinates multi-project wafer runs at Sai Micro across the nodes below. Open a node to see typical applications, what the run involves and how to book a shuttle slot.