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MPW / Shuttle access

Sai Micro Surface / bulk micromachining MPW

Plan a Surface / bulk micromachining multi-project wafer run at Sai Micro through TOMPW Service. We coordinate shared-mask access, EDA sign-off, shuttle scheduling and the downstream packaging or test path for global chip teams.

Node: Surface / bulk micromachiningMPW, NTO and production evaluation

Why Surface / bulk micromachining

Surface / bulk micromachining is one of the process options TOMPW coordinates as a shared-mask MPW run at the partner foundry. We handle slot selection, EDA checks and logistics so your design reaches the line on schedule.

What a Surface / bulk micromachining MPW at Sai Micro involves

A Surface / bulk micromachining MPW (multi-project wafer) shuttle places several customer designs on one shared mask set, so each team pays only for its portion of the wafer. TOMPW Service handles slot selection, DRC/LVS review and logistics so your GDSII reaches Sai Micro's line on schedule.

  1. Step 1: GDSII & spec

    Step 1

    GDSII & spec

    Share your GDSII, target node and tape-out window.

  2. Step 2: Slot & mask share

    Step 2

    Slot & mask share

    TOMPW books the next shuttle and aligns mask share.

  3. Step 3: Wafer, package, test

    Step 3

    Wafer, package, test

    Wafers returned, then package/test aligned as needed.

Pure-play MEMS foundry (Beijing 8-inch line)
MEMS process development and volume production
Wafer-level MEMS packaging
Design-enablement and EDA support

Technologies & platforms at Surface / bulk micromachining

MEMS
Sensor fabrication
BAW filters
Optical MEMS / micro-mirror
Micro-fluidics
Wafer-level packaging

Notes for Surface / bulk micromachining programs

  • Sai Micro is the China-based MEMS manufacturing arm of Sai MicroElectronics; Silex Microsystems (Sweden, already a TOMPW partner) is its subsidiary.
  • MEMS engagements are process- and design-based rather than standard CMOS MPW shuttles; TOMPW can help scope a Sai Micro MEMS program.

Best-fit applications

Inertial and pressure sensorsBAW / RF filtersOptical MEMS and LiDARBioMEMS and medical devicesMEMS foundry engagement

Expert reviewed

This page is reviewed by Henry, CEO, TOMPW Service. Henry is the CEO of TOMPW Service and a chip-design specialist with 20 years in the semiconductor industry.

Discuss a Surface / bulk micromachining MPW at Sai Micro

TOMPW Service can coordinate a Surface / bulk micromachining MPW shuttle with Sai Micro as part of a scoped execution path.

Email for a Quote

COMMON QUESTIONS

Working with Sai Micro Surface / bulk micromachining MPW through TOMPW

Can TOMPW arrange a Surface / bulk micromachining MPW shuttle at Sai Micro?

Yes. TOMPW coordinates Surface / bulk micromachining MPW and shuttle access at Sai Micro for overseas teams, handling slot selection, EDA checks and logistics so your design reaches the shared mask on schedule.

What does a Surface / bulk micromachining MPW run at Sai Micro typically include?

A Surface / bulk micromachining MPW run bundles your design onto a shared reticle with other projects, covering mask share, wafer fabrication at Sai Micro, and standard probe. Packaging, final test and NTO transition are planned separately with TOMPW.

How long does a Surface / bulk micromachining MPW cycle take at Sai Micro?

Cycle time depends on Sai Micro's shuttle cadence for Surface / bulk micromachining, usually a few months from mask data to returned wafers. Missing a window means waiting for the next one, so TOMPW recommends booking early.

What comes after a Surface / bulk micromachining MPW at Sai Micro?

After a successful Surface / bulk micromachining MPW, teams typically move to NTO or full-mask production. TOMPW helps plan that transition, including package selection, test development and volume ramp through Sai Micro and downstream partners.

PLAN & ESTIMATE

Calculators for your Surface / bulk micromachining MPW

Estimate dies per wafer, split shared-mask cost and model unit economics before you commit to a shuttle slot.

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RELATED SERVICES

Services that pair with a Sai Micro Surface / bulk micromachining MPW

RELATED MPW NODES

Other Surface / bulk micromachining and Sai Micro MPW access pages

Browse adjacent shuttle nodes so comparison and scheduling research stays on one program path.