MPW / Shuttle access
Sai MicroMPW & shuttle access
Sai Micro (Beijing Sai Microelectronics) is a China-based pure-play MEMS foundry operating an 8-inch MEMS line in Beijing and the Silex Microsystems facility in Sweden. TOMPW Service supports Sai Micro MEMS foundry engagements for sensors, BAW filters, optical MEMS and micro-fluidics.
Supported process nodes
5 MPW nodes at Sai Micro
Each node links to a dedicated planning page with calculators and shuttle context.
8-inch MEMS MPW
Plan a shared-mask run at Sai Micro on the 8-inch MEMS node.
Plan this node →Surface / bulk micromachining MPW
Plan a shared-mask run at Sai Micro on the Surface / bulk micromachining node.
Plan this node →SOI MEMS MPW
Plan a shared-mask run at Sai Micro on the SOI MEMS node.
Plan this node →Wafer-level packaging MPW
Plan a shared-mask run at Sai Micro on the Wafer-level packaging node.
Plan this node →TSV MPW
Plan a shared-mask run at Sai Micro on the TSV node.
Plan this node →Compare with other foundries
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Next step
Send node, package and schedule context first — we scope the right path after that.
A strong first MPW inquiry lists the target node, application, program stage and volume, plus whether package, test, PCB or firmware support are also needed.