MPW / Shuttle access
Silex MicrosystemsMPW & shuttle access
Silex Microsystems (Järfälla, Sweden), part of Sai MicroElectronics, is one of the world's leading pure-play MEMS foundries, offering wafer-level MEMS processes for sensors, microfluidics and optical MEMS.
Supported process nodes
4 MPW nodes at Silex Microsystems
Each node links to a dedicated planning page with calculators and shuttle context.
MEMS (surface / bulk micromachining) MPW
Plan a shared-mask run at Silex Microsystems on the MEMS (surface / bulk micromachining) node.
Plan this node →SOI MEMS MPW
Plan a shared-mask run at Silex Microsystems on the SOI MEMS node.
Plan this node →Wafer-level packaging MPW
Plan a shared-mask run at Silex Microsystems on the Wafer-level packaging node.
Plan this node →Through-silicon via (TSV) MPW
Plan a shared-mask run at Silex Microsystems on the Through-silicon via (TSV) node.
Plan this node →Compare with other foundries
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Next step
Send node, package and schedule context first — we scope the right path after that.
A strong first MPW inquiry lists the target node, application, program stage and volume, plus whether package, test, PCB or firmware support are also needed.