MPW / Shuttle access
IHPMPW & shuttle access
IHP (Leibniz-Institut für innovative Mikroelektronik) is a leading research foundry for SiGe BiCMOS and photonic integrated circuits. TOMPW Service supports IHP MPW and multi-project shuttle access for RF, mmWave and photonics programs.
Supported process nodes
4 MPW nodes at IHP
Each node links to a dedicated planning page with calculators and shuttle context.
0.13μm SiGe BiCMOS MPW
Plan a shared-mask run at IHP on the 0.13μm SiGe BiCMOS node.
Plan this node →0.25μm SiGe BiCMOS MPW
Plan a shared-mask run at IHP on the 0.25μm SiGe BiCMOS node.
Plan this node →130nm MPW
Plan a shared-mask run at IHP on the 130nm node.
Plan this node →250nm MPW
Plan a shared-mask run at IHP on the 250nm node.
Plan this node →MPW SHUTTLE PLAN
Shuttle windows at IHP by process node
The months below mark where a window commonly opens on each platform. A run launches once it fills, so read this as planning rhythm rather than a bookable date — send TOMPW your node and target quarter and we will tell you which run you can actually join.
SG13C SiGe:C RF CMOS
SG13G2 SiGe:C Bipolar/Analog
SG13G2Cu (FEOL process SG13G2 + Cu BEOL option from X-FAB)
SG13G3Cu (FEOL process + Cu BEOL option from X-FAB)
SG13G3 (FEOL process SG13G3Cu + Al-BEOL option)*
SG13S SiGe:C Bipolar/Analog
SG13SCu (FEOL process SG13S + Cu BEOL option from X-FAB)
MEMRES for SG13S
SG25 PIC (Photonics, Ge Photo-diode, BEOL)
SG25H5_EPIC high performance BiCMOS + Photonic
BEOL SG13 (M1 and Metal Layers Above) + optional LBE or TSV or RDL
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Next step
Send node, package and schedule context first — we scope the right path after that.
A strong first MPW inquiry lists the target node, application, program stage and volume, plus whether package, test, PCB or firmware support are also needed.